Starting with the sensor, measuring and controlling temperature is an essential building block of process industries. Automatic control in continuous processes uses industrial control systems to ...

Overlay control based on DI metrology of optical targets has been the primary basis for run-to-run process control for many years. In previous work we described a scenario where optical overlay ...

Process control can be viewed as the executive portion of a unit process. It provides the means to direct a process so that it produces the desired results. It is complementary to the role played by ...